The itm/ita files are the originally acquired data prior to any data processing. They can be accessed using SurfaceLab 6 (ION-TOF commercial software). 

If one does not have access to ION-TOF commercial software, MATLAB mat-files containing the numerical data for the reconstructed secondary ion image (of the mass peaks with a minimum of 15,000 counts, a minimum of 3.0 SNR and a maximum of 0.8 background) are included as well.

-	"num1" : numerical data of secondary ion images
-	"total1" : numerical data of total ion image
-	"im_info" : image dimensions ("IMAGECHAR") and mass peaks ("mz")

Also included is the interferometry data: 

-	"ROI_topography" : white light interferometry heightmap
-	"ROI_contrast" : optical image obtained from the interferometer